Main page of Ultrasharp Silicon Cantilevers The package Ultrasharp Silicon Cantilevers Ultrasharp Silicon Cantilever Tests SC11 and SC21 series with triangular springs

SC12 series of Ultrasharp silicon cantilevers with straight springs

The main feature of SC12 series of Ultrasharp silicon cantilevers is a tip's position on the spring. The tip is located very close to the edge of the spring. It is very convenient for deep

trench scanning. SC12 series cantilever chip has six straight springs with different characteristics that allows to choose easily the spring you need.

Ultrasharp silicon cantilevers chip of SC12       series includes 6 straight springs. Thickness       of the chip is 0.45 mm.

SEM images of CONTACT Ultrasharp silicon cantilever tip           (SC12 series).

SC12 series of Ultrasharp silicon cantilevers specifications

	Canti- lever type	Cantilever length, l, um	Cantilever width, w, um	* Cantilever thickness, um			* Resonant frequency, kHz			* Force constant, N/m
				min	typical	max	min	typical	max	min	typical	max
	A	120	35	0.9	1.0	1.1	70	90	110	0.5	0.7	1.0
	B	90	35	0.9	1.0	1.1	130	160	190	1.2	1.7	2.3
	C	130	35	0.9	1.0	1.1	60	75	90	0.4	0.6	0.8
	D	300	35	0.9	1.0	1.1	12	15	18	0.03	0.05	0.07
	E	350	35	0.9	1.0	1.1	8	10	12	0.02	0.03	0.04
	F	250	35	0.9	1.0	1.1	16	20	24	0.06	0.08	0.10
	A	120	35	1.9	2.0	2.1	140	180	220	5	6	7
	B	90	35	1.9	2.0	2.1	260	320	380	12	14	16
	C	130	35	1.9	2.0	2.1	120	150	180	4.0	4.5	5.5
	D	300	35	1.9	2.0	2.1	25	30	35	0.30	0.35	0.45
	E	350	35	1.9	2.0	2.1	16	20	24	0.20	0.25	0.30
	F	250	35	1.9	2.0	2.1	32	40	48	0.55	0.65	0.75

A supplementary specifications sheet detailing the exact values of the labeled * parameters to each UltraSharp silicon cantilevers package

If you have any specific wishes or demands,
PLEASE CONTACT US: usharp@ntmdt.zgrad.ru

Copyright © 1998, NT-MDT Send comments to bykovav@ntmdt.zgrad.ru