SFM image of
silicon calibration grating (Grating type - TGX01)
. 4.8x3.5 um scan size.
The conditions of the measurument
Date
22-Aug-1996
Device
Solver-P4
(18 bit DAC, scanning area 20um x 20um)
Mode
SFM contact mode
Probe
Gold coated silicon nitride cantilever with curve radius 20nm
Image courtesy of
S.Nesterov
, NT-MDT, Moscow, Russia.
Non published.
Copyright © 1996,
NT-MDT
Send comments to
bykovav@ntmdt.zgrad.ru