NT-MDT Ultrasharp Silicon Gratings

Silicon square grating with negative angles TGX01

Appropriate for tip cone angle, radius
determination and piezoscaner calibration
along plane

Active area: 1x1 mm array
Edge radii: 10 nm

Silicon tip grating TGT01

Appropriate for tip cone angle, shape, radius
determination and piezoscaner calibration
along plane

Active area: 1x1 mm array
Edge radii: 10 nm

Linear silicon gratings with silicon oxide calibrating steps TGZ01, TGZ02, TGZ03

Appropriate for piezoscaner
calibration along height

Active area: 3x3 mm array
Steps height: 20 nm (TGZ01),
100 nm (TGZ02), 600 nm (TGZ03)

Silicon triangular grating TGG01

Appropriate for tip diameter determination

Active area: 3x3 mm array
Edge radii: 10 nm

A supplementary specifications sheet detailing the exact values of the
labeled * sizes is attached to each UltraSharp silicon gratings package.